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System Design of a Thermal Control Unit for the Semiconductor Industry

System Design of a Thermal Control Unit for the Semiconductor IndustryCompass Manufacturing Services recently completed design and assembly of a thermal control unit for a customer in the semiconductor industry. This standalone radial jet thermal control unit delivers liquid to a heating and cooling system used during debug and failure analysis of microprocessors. The system required very specialized features and a software component, and had to meet a number of industry standards. It also required us to meet machinery, low voltage, and electromagnetic compatibility directives.

The steel-framed thermal control unit, which incorporated our hydraulic and control system design capabilities, measured 28" wide x 43" long x 67" high (excluding umbilical). Temperature control is maintained to ±1°C at ±.1 gpm. The mobile machine featured a 5 micron filtration, and UV sterilization of circulating fluid, a resin cartridge which produces moderately deionized water, and an umbilical connection to ancillary equipment. In addition this system also included Touch Panel PC with Windows 7 Software.

Upon completion of a prototype for this very detailed system, we performed factory acceptance testing (FAT) and third party safety analysis as well as a CE evaluation. To learn more about this project, see the table below or contact us directly.

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Highlights of this System Design & Assembly Project

Radial Jet Thermal Control Unit Design Project This Thermal Control Unit delivers liquid to a heating/cooling system used during debug and failure analysis of microprocessors.
System Design Assembly Capabilities Applied/Processes
Primary:
System Design
Hydraulic Design
Control System Design
Secondary:
Assembly
Overall Part Dimensions 67"h x 28"w x 43" L (excluding umbilical)
Tightest Tolerances ± 1°C
± .1 gpm
Features
  • 5 micron filtrations of circulating fluid
  • UV lamp to sterilize circulating fluid
  • Resin cartridge to produce moderately deionized water
  • The machine is mobile
  • Umbilical connection to ancillary equipment
  • Welded steel frame
  • Secondary containment of hazardous fluids
Software Touch Panel PC
Windows 7 operating system
Facility Requirements
Process Chilled Water
  • 3 gpm
Electrical Supply
  • Voltage: 200-230VAC
  • Frequency: 50-60Hz
  • Amp: 30A
Air Supply
  • Max Pressure: 160psi
  • 25 cu. ft./min, dry
In process testing/inspection performed Factory Acceptance Testing (FAT)
Third Party Safety and CE Evaluation
Industry for Use Semiconductor Industry
Delivery of First Prototype 12 Weeks
Standards Met SEMI S1, S2, S8, S13, S22
The National Electrical Code
Uniform Fire Code; NFPA 70/79
EN 60204-1; Safety
EN 61000-6-4: 2007 Generic Standards:
  • Emission Standard for Industrial Environments
EN 61000-6-2: 2005 Generic Standards:
  • Immunity for Industrial Environments
Directions Met Machinery Directive (2006/42/EC)
Low Voltage Directive (2006/95/EC)
Electromagnetic Compatibility Directive (2004/108/EC)
Product Name Stand Alone Radial Jet Thermal Control Unit

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